Charging studies using the CHARM2 wafer surface charging monitor
Open Access
- 1 April 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 74 (1-2) , 301-305
- https://doi.org/10.1016/0168-583x(93)95065-d
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Charging studies with “CHARM”Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Ion beam induced wafer chargingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989