Compatibility of CO gas sensitive SnO2/Pt thin film with silicon integrated circuit processing
- 10 June 2000
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 64 (1-3) , 49-53
- https://doi.org/10.1016/s0925-4005(99)00482-7
Abstract
No abstract availableKeywords
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