Accurate method for determining adhesion of cantilever beams
- 15 July 1999
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 86 (2) , 817-827
- https://doi.org/10.1063/1.370809
Abstract
Using surface micromachined samples, we demonstrate the accurate measurement of cantilever beam adhesion by using test structures which are adhered over long attachment lengths. We show that this configuration has a deep energy well, such that a fracture equilibrium is easily reached. When compared to the commonly used method of determining the shortest attached beam, the present method is much less sensitive to variations in surface topography or to details of capillary drying.This publication has 24 references indexed in Scilit:
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