Hochauflösende Auger-Elektronenspektroskopie zur Untersuchung von Hartstoffbeschichtungen
- 1 June 1984
- journal article
- research article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 319 (6-7) , 777-783
- https://doi.org/10.1007/bf01226770
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A high rate sputtering process for the formation of hard friction-reducing TiN coatings on toolsThin Solid Films, 1982
- Depth resolution of sputter profiling investigated by combined Auger-x-ray analysis of thin filmsNuclear Instruments and Methods, 1980