Low pressure deposition of polycrystalline silicon from silane
- 1 August 1981
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 54 (2) , 310-322
- https://doi.org/10.1016/0022-0248(81)90475-9
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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