Fabrication of single-crystal lithium niobate films by crystal ion slicing
- 19 October 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (16) , 2293-2295
- https://doi.org/10.1063/1.121801
Abstract
We report on the implementation of crystal ion slicing in lithium niobate ( LiNbO 3 ). Deep-ion implantation is used to create a buried sacrificial layer in single-crystalc-cut poled wafers of LiNbO 3 , inducing a large etch selectivity between the sacrificial layer and the rest of the sample. 9-μm-thick films of excellent quality are separated from the bulk and bonded to silicon and gallium arsenide substrates. These single-crystalfilms have the same room-temperature dielectric and pyroelectriccharacteristics, and ferroelectric transition temperature as single-crystal bulk. A stronger high-temperature pyroelectric response is found in the films.Keywords
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