Electronic core level microanalyses and microscopies in multipurpose apparatus

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Abstract
Using an instrument equipped with two electron guns, an electron analyzer, and a Si(Li) diode detector, we developed microanalytical techniques based on inner‐shell electron excitations by incident electrons and X‐rays, that is, electron energy‐loss spectroscopy (EELS) in the reflection mode; electron probe microanalysis (EPMA) and X‐ray appearance potential spectroscopy (XAPS); electron‐induced Auger electron spectroscopy (e‐AES); X‐ray photoelectron spectroscopy (XPS), X‐ray absorption spectroscopy (XAS); X‐ray induced AES (XAES), X‐ray fluorescence analysis (XRF), and scanning X‐ray radiography (SXR). The corresponding characteristic images (including X‐ray microradiography and X‐ray photoelectron microscopy) were obtained in the scanning mode. The principle of the apparatus is described. Each spectroscopy and microscopy is illustrated by an example. Their performance and limits are discussed.