Investigation of hard a-C:H layers generated by a novel r.f. plasma beam source
- 31 August 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 47 (1-3) , 162-172
- https://doi.org/10.1016/0257-8972(91)90278-5
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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