Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current
Top Cited Papers
- 22 November 2011
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 19 (25) , 24897-24904
- https://doi.org/10.1364/oe.19.024897
Abstract
We present a compact 1.3 × 4 μm2 Germanium waveguide photodiode, integrated in a CMOS compatible silicon photonics process flow. This photodiode has a best-in-class 3 dB cutoff frequency of 45 GHz, responsivity of 0.8 A/W and dark current of 3 nA. The low intrinsic capacitance of this device may enable the elimination of transimpedance amplifiers in future optical data communication receivers, creating ultra low power consumption optical communications.Keywords
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