Structural study of a Si(001) grating surface by white beam x-ray Laue photography
- 27 June 1994
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (26) , 3554-3556
- https://doi.org/10.1063/1.111222
Abstract
We demonstrate in this letter that an x-ray diffraction pattern from a two-dimensional surface grating of periods 0.3 μm can be obtained by means of white beam Laue photography using synchrotron radiation. Such photographs or images can provide direct and useful information on the shape of the grating pillars as well as the crystalline quality of the grating material.Keywords
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