X-ray elastic constants, stress profiling and composition of physically vapor deposited ZrN films
- 1 March 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 197 (1-2) , 47-55
- https://doi.org/10.1016/0040-6090(91)90220-r
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Residual stress in physically vapor deposited films: A study of deviations from elastic behaviorThin Solid Films, 1989
- The relationship between residual stress, X-ray elastic constants and lattice parameters in TiN films made by physical vapor depositionThin Solid Films, 1989
- Residual stresses and residual stress distributions in TiCN- and TiN-coated steelsSurface and Coatings Technology, 1988
- Residual stress and X-ray elastic constants in highly textured physically vapor deposited coatingsSurface and Coatings Technology, 1988
- Structure of Titanium Nitride coatings deposited by physical vapour deposition: A unified structure modelSurface and Coatings Technology, 1988
- Physical vapor-deposited TiN on cemented carbide: Tempering effectsSurface and Coatings Technology, 1988
- Variations in the reflectance of TiN, ZrN and HfNThin Solid Films, 1988
- The chemical analysis of TiN films: A round robin experimentThin Solid Films, 1987
- Ion-plated HfN coatingsThin Solid Films, 1984
- Intrinsic intergranular brittleness of molybdenumScripta Metallurgica, 1981