Fabrication of dry-etched mirrors in GaAs-based and InP-based lasers using chemically assisted ion-beam etching at low temperatures
- 1 September 1996
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 25 (9) , 1446-1450
- https://doi.org/10.1007/bf02655381
Abstract
No abstract availableKeywords
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