Surface oxidation of TiNx films
- 1 July 1991
- journal article
- Published by Elsevier in Surface Science
- Vol. 251-252, 1038-1043
- https://doi.org/10.1016/0039-6028(91)91147-p
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Algorithms for the rapid simulation of Rutherford backscattering spectraNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Thermal Oxidation of Reactively Sputtered Titanium Nitride and Hafnium Nitride FilmsJournal of the Electrochemical Society, 1983
- The use of titanium-based contact barrier layers in silicon technologyThin Solid Films, 1982
- Oxidation kinetics of TiN thin filmsJournal of Applied Physics, 1981