Influence of the dose rate on the damage production in ion implanted GaAs
- 1 November 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 52 (1) , 57-62
- https://doi.org/10.1016/0168-583x(90)90601-p
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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