Pentacene devices and logic gates fabricated by organic vapor phase deposition
- 13 November 2006
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 89 (20) , 203502
- https://doi.org/10.1063/1.2388864
Abstract
An organic vapor phase deposition (OVPD) tool has been developed and optimized for the deposition of pentacene thin films. Pentacene is grown with a good thickness uniformity, a good material consumption efficiency, and deposition rates up to 9.5 Å ∕ s . Top-contact transistors based on OVPD-grown pentacene show high mobilities (up to 1.35 cm 2 ∕ V s ) and excellent characteristics, even at high deposition rates. Elementary circuit blocks have also been produced using an OVPD-deposited pentacene film. A five-stage ring oscillator features a stage delay of 2.7 μ s at a supply voltage of 22 V .Keywords
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