Characteristics of ZnO:Cr thin films deposited by spray pyrolysis
- 1 September 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 18 (5) , 2098-2101
- https://doi.org/10.1116/1.1287444
Abstract
Chromium-doped zinc oxide thin films were deposited using the spray pyrolysis technique. In all cases 15 at. % of chromium in solution was used. Under diluted HCl, a low etching rate in ZnO:Cr thin films is obtained, as compared to undoped ZnO. As-deposited and vacuum-annealed films show a high resistivity. X-ray diffraction spectra show no extra phases present. A low incorporation efficiency of chromium into the ZnO films is observed, and less than 1 at.% chromium is present in the films and (002) preferential growth is observed in all cases. High transmittance is obtained, which makes films adequate for transparent and protective coatings.Keywords
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