Electron Microscope Studies Of Ion Implanted Silicon And Gallium Arsenide After Laser And Furnace Annealing
- 1 January 1980
- journal article
- Published by Wiley in Journal of Microscopy
- Vol. 118 (1) , 51-59
- https://doi.org/10.1111/j.1365-2818.1980.tb00245.x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Laser annealing of capped and uncapped GaAsElectronics Letters, 1979
- A new thin film encapsulant for ion-implanted GaAsThin Solid Films, 1975
- Properties of LasersPublished by Elsevier ,1971