Determination of optical parameters for amorphous thin film materials on semitransparent substrates from transmittance and reflectance measurements
- 14 November 1991
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 24 (11) , 2088-2094
- https://doi.org/10.1088/0022-3727/24/11/028
Abstract
A procedure is described for the determination of optical thin film parameters from oblique incidence photometric measurements with respect to substrate dispersion and absorption. The procedure has been used successfully for the determination of optical parameters n and alpha of amorphous carbon layers.Keywords
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