Residual stresses in dielectrics caused by metallization lines and pads
- 30 June 1996
- journal article
- research article
- Published by Elsevier in Acta Materialia
- Vol. 44 (6) , 2353-2359
- https://doi.org/10.1016/1359-6454(95)00341-x
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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