Electron irradiation of silicon dioxide: a non-destructive measurement of the in-depth induced compositional changes
- 1 January 1992
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 59 (1) , 79-85
- https://doi.org/10.1016/0169-4332(92)90171-s
Abstract
No abstract availableKeywords
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