Abstract
Gas‐source molecular beam epitaxy growth of GaxIn1−xAsyP1−y layers lattice matched to GaAs is reported. X‐ray diffraction, photoluminescence, and Hall measurements show that the layers are of good quality. High‐quality GaAs/GaxIn1−xAsyP1−y heterojunction and (In)GaAs/GaxIn1−xAsyP1−y quantum well structures have also been prepared, as deduced from the device characteristics of heterojunction diodes and quantum well lasers.