Morphological phases of tungsten thin films on gallium arsenide
- 1 July 1985
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 47 (1) , 19-20
- https://doi.org/10.1063/1.96413
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Tungsten patterning as a technique for selective area III–V MBE growthJournal of Vacuum Science & Technology B, 1985
- Plasma-enhanced chemical vapor deposition of β-tungsten, a metastable phaseApplied Physics Letters, 1984
- Comparison of laser-initiated and thermal chemical vapor deposition of tungsten filmsApplied Physics Letters, 1984
- Reactions of vacuum-deposited thin Schottky barrier metallizations on gallium arsenideJournal of Vacuum Science and Technology, 1979
- Columnar microstructure in vapor-deposited thin filmsThin Solid Films, 1977