Deposition of (100) oriented MgO thin films on sapphire by a spray pyrolysis method
- 18 June 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (25) , 2522-2523
- https://doi.org/10.1063/1.103188
Abstract
Thin films of magnesia have been deposited by a novel spray pyrolysis method. An aqueous magnesium acetylacetonate solution was ultrasonically nebulized, transported in flowing oxygen, and thermally decomposed on silicon (100), sapphire, and fused silica at temperatures between 400 and 550 °C. The films were from 0.1 to 0.5 μm thick, optically transparent, and smooth. The MgO films were poorly crystalline as deposited. MgO films on sapphire crystallized with strong (100) orientation after annealing at 700 and 930 °C in flowing oxygen.Keywords
This publication has 8 references indexed in Scilit:
- Growth and characterization of zinc sulfide films by conversion of zinc oxide films with H2SMaterials Research Bulletin, 1989
- Effect of buffer layers on low-temperature growth of mirror-like superconducting thin films on sapphireApplied Physics Letters, 1989
- Preparation and characterization of copper(II) oxide thin films grown by a novel spray pyrolysis methodMaterials Research Bulletin, 1989
- Metalorganic chemical vapor deposition of [100] textured MgO thin filmsApplied Physics Letters, 1989
- Thin film growth of YBa2Cu3O7 by spray pyrolysisJournal of Crystal Growth, 1988
- Y-Ba-Cu-O Thin Film on Si SubstrateJapanese Journal of Applied Physics, 1988
- Y1Ba2Cu3O7−δ thin films grown by a simple spray deposition techniqueApplied Physics Letters, 1988
- Preparation and substrate reactions of superconducting Y-Ba-Cu-O filmsApplied Physics Letters, 1987