Performance of layered synthetic microstructures in monochromator applications in the soft X-ray region
- 1 May 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 246 (1-3) , 352-355
- https://doi.org/10.1016/0168-9002(86)90105-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Design considerations for the X-ray lithography station at the Stanford synchrotron radiation laboratoryNuclear Instruments and Methods in Physics Research, 1984
- Soft X-ray microscopy/lithography branch line at SSRLNuclear Instruments and Methods, 1980
- Modelling of planar transmission-type diffraction gratings compatible with synchrotron radiation sourcesNuclear Instruments and Methods, 1980