Improvement in brightness of multicusp-plasma ion source
- 1 November 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 20 (6) , 2717-2720
- https://doi.org/10.1116/1.1526694
Abstract
The beam brightness of a multicusp-plasma ion source has been substantially improved by optimizing the source configuration and extractor geometry. The current density of a 2 keV beam extracted from a 7.5-cm-diameter source operating at 2.5 kW rf power is which is times larger than that of a beam extracted from a 5-cm-diameter source operating at 1 kW rf power. A smaller focused beam spot size is achieved with a counter-bored extractor instead of a conventional (“through-hole”) extractor, resulting another order of magnitude improvement in beam current density. Measured beam brightness can be as high as which represents a 30 times improvement over prior work.
Keywords
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