Preparation of Al2O3 coatings by pyrolysis of Al-acetylacetonate in Ar-atmosphere
- 1 January 1996
- journal article
- Published by Elsevier in International Journal of Refractory Metals and Hard Materials
- Vol. 14 (1-3) , 59-67
- https://doi.org/10.1016/0263-4368(96)83418-4
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Aluminum oxide thin films prepared by chemical vapor deposition from aluminum acetylacetonateApplied Physics Letters, 1992
- Einfluß des totvolumens auf die Al2O3-CVD-AbscheidungInternational Journal of Refractory Metals and Hard Materials, 1991
- Aluminum oxide thin films prepared by chemical vapor deposition from aluminum 2-ethylhexanoateApplied Physics Letters, 1991
- Adhesion measurements of chemically vapor deposited and physically vapor deposited hard coatings on WCCo substratesThin Solid Films, 1987
- Preparation and optical characterization of pyrolytically deposited thin films of some metal oxidesThin Solid Films, 1986
- Preparation of Oxide Films by Pyrolysis and Investigation of their Structure Sensitive PropertiesJournal of Vacuum Science and Technology, 1969
- The preparation of thin films of some oxides by the pyrolysis methodThin Solid Films, 1968
- Crystal Growth of a New Laser Material, FluorapatiteJournal of the Electrochemical Society, 1968
- Deposition and Properties of Aluminum Oxide Obtained by Pyrolytic Decomposition of an Aluminum AlkoxideJournal of the Electrochemical Society, 1967