Investigations of 3C-SiC inclusions in 4H-SiC epilayers on 4H-SiC single crystal substrates
- 1 March 1997
- journal article
- research article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 26 (3) , 151-159
- https://doi.org/10.1007/s11664-997-0142-4
Abstract
No abstract availableKeywords
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