Simulation of kinetic effects in inductive discharges
- 1 May 1996
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 5 (2) , 159-165
- https://doi.org/10.1088/0963-0252/5/2/007
Abstract
We show that, under certain conditions of practical interest, radio frequency inductive discharges can exhibit kinetic effects arising from the random thermal motion of electrons. The electrical response of the plasma is altered in this kinetic regime. More power is dissipated than is expected from cold plasma theory and the spatial distributions of the induced currents and fields change. Moment- or fluid-based simulations do not normally include these kinetic effects, but we show that the introduction of an appropriate viscosity into the moment equations can make them accurate in the kinetic regime.Keywords
This publication has 20 references indexed in Scilit:
- The Darwin Direct Implicit Particle-in-Cell (DADIPIC) Method for Simulation of Low Frequency Plasma PhenomenaJournal of Computational Physics, 1995
- Analytic model of power deposition in inductively coupled plasma sourcesJournal of Applied Physics, 1995
- Plasma processingIEEE Transactions on Plasma Science, 1994
- Two-dimensional fluid model of high density inductively coupled plasma sourcesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Two-dimensional modeling of high plasma density inductively coupled sources for materials processingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Collisionless electron heating in an inductively coupled dischargePhysical Review Letters, 1993
- Electromagnetic fields in a radio-frequency induction plasmaJournal of Vacuum Science & Technology A, 1993
- Langmuir probe measurements of a radio frequency induction plasmaJournal of Vacuum Science & Technology A, 1993
- Multipole confined diffusion plasma produced by 13.56 MHz electrodeless sourceJournal of Vacuum Science & Technology A, 1989
- Characteristics of electron cyclotron resonance plasma sourcesJournal of Vacuum Science & Technology A, 1989