Multi-level interconnects for heterojunction bipolar transistor integrated circuit technologies
- 1 December 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 290-291, 435-439
- https://doi.org/10.1016/s0040-6090(96)09058-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Feasibility of BCB as an interlevel dielectric in integrated circuitsJournal of Electronic Materials, 1994
- Pnp HBT with 66 GHz f/sub max/IEEE Electron Device Letters, 1994
- Processing and microwave characterization of multilevel interconnects using benzocyclobutene dielectricIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1993