A Curved-Beam Bistable Mechanism
Top Cited Papers
- 13 April 2004
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 13 (2) , 137-146
- https://doi.org/10.1109/jmems.2004.825308
Abstract
This paper presents a monolithic mechanically-bistable mechanism that does not rely on residual stress for its bistability. The typical implementation of this mechanism is two curved centrally-clamped parallel beams, hereafter referred to as "double curved beams". Modal analysis and finite element analysis (FEA) simulation of the curved beam are used to predict, explain, and design its bistable behavior. Microscale double curved beams are fabricated by deep-reactive ion etching (DRIE) and their test results agree well with the analytic predictions. Approaches to tailor the bistable behavior of the curved beams are also presented.Keywords
This publication has 9 references indexed in Scilit:
- Design of a microgripping system with visual and force feedback for MEMS applicationsPublished by Institution of Engineering and Technology (IET) ,2006
- An Instrument to Measure the Stiffness of Mems MechanismsPublished by Springer Nature ,2005
- Testing And Characterization Of A Bistable Snaoping Microactuator Based On Thermo-mechanical AnalysisPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Why is (111) Silicon a Better Mechanical Material for MEMS?Published by Springer Nature ,2001
- On a tunable bistable MEMS-theory and experimentJournal of Microelectromechanical Systems, 2000
- Bistable planar polysilicon microactuator with shallow arch-shaped leaf springsPublished by SPIE-Intl Soc Optical Eng ,1999
- All-silicon bistable micromechanical fiber switch based on advanced bulk micromachiningIEEE Journal of Selected Topics in Quantum Electronics, 1999
- An analytical analysis of a compressed bistable buckled beamPublished by Elsevier ,1998
- Bistable microvalve with pneumatically coupled membranesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1996