All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 5 (1) , 46-51
- https://doi.org/10.1109/2944.748104
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- The Black Silicon Method V: A Study Of The Fabricating Of Movable Structures For Micro Electromechanical SystemsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Thermooptical digital switch arrays in silica-on-silicon with defined zero-voltage stateJournal of Lightwave Technology, 1998
- All-silicon bistable micromechanical fibre switchesElectronics Letters, 1998
- (2×2) digital optical switch realised by lowcostpolymer waveguide technologyElectronics Letters, 1996
- Micromachined 1 × 2 optical-fiber switchSensors and Actuators A: Physical, 1996
- Micro-opto mechanical switchintegrated on siliconElectronics Letters, 1995
- SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structuresSensors and Actuators A: Physical, 1994
- Etching front control of strips for corner compensationSensors and Actuators A: Physical, 1993
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988
- Silicon as a mechanical materialProceedings of the IEEE, 1982