Laser nonlinear-optical probing of silicon/SiO2 interfaces: Surface stress formation and relaxation
- 1 April 1990
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 50 (4) , 439-443
- https://doi.org/10.1007/bf00323603
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Local and nonlocal surface nonlinearities for surface optical second-harmonic generationPhysical Review B, 1987
- Phenomenological theory of optical second- and third-harmonic generation from cubic centrosymmetric crystalsPhysical Review B, 1987
- Study of Si(111) Surfaces by Optical Second-Harmonic Generation: Reconstruction and Surface Phase TransformationPhysical Review Letters, 1985
- Interrelation of Si Internal Stress and Si/SiO2 Interface StressJapanese Journal of Applied Physics, 1984
- Second-Harmonic Reflection from Silicon Surfaces and Its Relation to Structural SymmetryPhysical Review Letters, 1983
- Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substratesJournal of Applied Physics, 1978
- Light Waves at the Boundary of Nonlinear MediaPhysical Review B, 1962