A combined scanning tunnelling microscope and x-ray interferometer
- 30 August 2001
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 12 (10) , 1660-1665
- https://doi.org/10.1088/0957-0233/12/10/306
Abstract
A monolithic x-ray interferometer made from silicon and a scanning tunnelling microscope have been combined and used to calibrate grating structures with periodicities of 100 nm or less. The x-ray interferometer is used as a translation stage which moves in discrete steps of 0.192 nm, the lattice spacing of the silicon (220) planes. Hence, movements are traceable to the definition of the metre and the nonlinearity associated with the optical interferometers used to measure displacement in more conventional metrological scanning probe microscopes (MSPMs) removed.Keywords
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