TiNi-based thin films in MEMS applications: a review
Top Cited Papers
- 8 April 2004
- journal article
- review article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 112 (2-3) , 395-408
- https://doi.org/10.1016/j.sna.2004.02.019
Abstract
No abstract availableKeywords
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