Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces
- 18 October 2004
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 85 (16) , 3629-3631
- https://doi.org/10.1063/1.1808872
Abstract
We present a technique for patterning thin-film metals (silver and gold) without the need for photolithography. The technique involves microfluidics and can be performed on planar or curved surfaces. Patterns of thin-film metal are fabricated by flowing electroless silver or gold plating solutions through predefined microchannels made of polydimethylsiloxane sealed against a surface of interest. We demonstrate metal resistors with 100-μm-wide traces fabricated on planar and curved surfaces. The surface profile, mechanical gauge factor, and temperature coefficient of resistance have been characterized. Application of the resistors as hot-wire flow sensors has also been demonstrated.Keywords
This publication has 15 references indexed in Scilit:
- Microfluidic etching driven by capillary forces for rapid prototyping of gold structuresMicroelectronic Engineering, 2003
- Fabrication of micro-structures using non-planar lithography (NPL)Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Microfluidic Networks Made of Poly(dimethylsiloxane), Si, and Au Coated with Polyethylene Glycol for Patterning Proteins onto SurfacesLangmuir, 2001
- Monolithic Microfabricated Valves and Pumps by Multilayer Soft LithographyScience, 2000
- AMANDA—surface micromachining, molding, and diaphragm transferSensors and Actuators A: Physical, 1999
- Microfabrication Inside Capillaries Using Multiphase Laminar Flow PatterningScience, 1999
- Three-Dimensional Metallic Microstructures Fabricated by Soft Lithography and MicroelectrodepositionLangmuir, 1999
- Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)Analytical Chemistry, 1998
- Constructing single- and multiple-helical microcoils and characterizing their performance as components of microinductors and microelectromagnetsJournal of Microelectromechanical Systems, 1997
- Polymer microstructures formed by moulding in capillariesNature, 1995