The gaseous anodisation of tantalum
- 1 January 1967
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 2 (1) , 12-17
- https://doi.org/10.1007/bf00550047
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Silicon Oxidation in an Oxygen Plasma Excited by MicrowavesJournal of Applied Physics, 1965
- The Plasma Oxidation of Metals in Forming Electronic Circuit ComponentsIEEE Transactions on Component Parts, 1964
- Plasma Anodized Aluminum Oxide FilmsJournal of the Electrochemical Society, 1964
- Plasma-anodized thin-film capacitors for integrated circuitsProceedings of the IEEE, 1964
- The Formation of Metal Oxide Films Using Gaseous and Solid ElectrolytesJournal of the Electrochemical Society, 1963