Characterization of a cantilever with an integrated deflection sensor
- 1 August 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 264 (2) , 159-164
- https://doi.org/10.1016/0040-6090(94)05829-6
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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