Y-Ba-Cu Oxide Thin Films Prepared by DC Magnetron Sputtering

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Abstract
Superconducting Y-Ba-Cu oxide thin films were sputtered on MgO(100) substrates by DC magnetron sputtering from an oxide powder target. The films were deposited at the high rates of 9–29 nm/min and showed, at best, T ce (R=0) up to 78 K with a transition width Δ T c of 5 K, after annealing in oxygen for 1 h at 900°C. The X-ray diffraction pattern showed a highly preferred orientation of the c-axis even in the thick (2.0 µm) film. The film sputtered at a higher deposition rate had a broad transition width Δ T c=22 K and its X-ray diffraction pattern showed the coexistence of orthorhombic and tetragonal phases.