Preparation of High-Tc Superconducting Films by Q-Switched YAG Laser Sputtering

Abstract
A laser sputtering technique using visible light from a Q-switched YAG laser is proven to be of use for high-T c Y-Ba-Cu-O superconducting film fabrication. The obtained films reveal onset T c of 98 K and offset T c of 90 K, which are very similar to the bulk target material. The compositional ratios of Ba/Y and Cu/Y in as-sputtered films are found to be in perfect agreement with those in the bulk target material for a used laser power range. These results are well explained by a cluster model for the sputtering process.