Film growth of metals and semiconductors with ionized beams and surface imperfections
- 1 December 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 39, 25-34
- https://doi.org/10.1016/0040-6090(76)90621-0
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education
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