Measurement of surface profiles by the focusing method
- 1 November 1989
- Vol. 134 (2) , 221-229
- https://doi.org/10.1016/0043-1648(89)90126-9
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Development of a high resolution sensor for surface roughness.Journal of the Japan Society for Precision Engineering, 1987
- Physical limitations of optical defocusing techniquesWear, 1986
- Roughness measurement of ground, turned and shot-peened surfaces by the light scattering methodWear, 1986
- Optical profilometer: a new method for high sensitivity and wide dynamic rangeApplied Optics, 1982
- Real-time digital heterodyne interferometry: a systemApplied Optics, 1980