Simulation of retarded diffusion of antimony and enhanced diffusion of phosphorus in silicon
- 1 December 1987
- journal article
- research article
- Published by Springer Nature in Zeitschrift für Physik B Condensed Matter
- Vol. 67 (4) , 415-420
- https://doi.org/10.1007/bf01304107
Abstract
No abstract availableKeywords
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