Formation of silicon nitride structures by direct electron beam writing
- 15 February 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 38 (4) , 253-255
- https://doi.org/10.1063/1.92334
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Interplay of the monohydride phase and a newly discovered dihydride phase in chemisorption of H on Si(100)2 × 1Physical Review B, 1976