Effect of the oxygen deficiency of ceramic TiO2−x targets on the deposition of TiO2 thin films by DC magnetron sputtering
- 12 August 2004
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 36 (8) , 1167-1170
- https://doi.org/10.1002/sia.1867
Abstract
No abstract availableKeywords
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