The optical properties of amorphous and crystalline silicon
- 5 February 1977
- journal article
- Published by IOP Publishing in Journal of Physics C: Solid State Physics
- Vol. 10 (3) , 467-477
- https://doi.org/10.1088/0022-3719/10/3/017
Abstract
The optical constants n and k of amorphous and crystalline films of silicon have been found from measurements of reflectance and transmittance at normal incidence over the wavelength range from 2500 to 500 nm, and extended to 300 nm by the method of measuring reflectances from the specimen itself and after depositing on it a thin layer of Ta2O5. This latter method has also been made of the effects of annealing on amorphous films. The measurements on single-crystal silicon have been compared with the results of others obtained by Kramers-Kronig analysis.Keywords
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