Synchrotron lithography for sub-half-micron T-Gates in GAAS-FET
- 31 December 1986
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 5 (1-4) , 239-246
- https://doi.org/10.1016/0167-9317(86)90050-x
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- X-ray lithographyMicroelectronic Engineering, 1985
- Submicrometre lift-off line with T-shaped cross-sectional formElectronics Letters, 1981