In-situ sputter deposition of PT and PZT films on Platinum and RuO2 electrodes
- 1 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1-4) , 177-180
- https://doi.org/10.1016/0167-9317(95)00139-5
Abstract
No abstract availableKeywords
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