An alternative method of preparing hydrogen-doped evaporated amorphous silicon preliminary report
- 1 January 1981
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine Part B
- Vol. 43 (1) , 169-172
- https://doi.org/10.1080/01418638108225810
Abstract
We present a preliminary report on the preparation of hydrogen-doped amorphous silicon films by electron-gun evaporation in the presence of an atomic-hydrogen plasma in the immediate vicinity of the substrates. Infra-red spectra and some electrical conductivity results are presented.Keywords
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