A thermal detachment mechanism for particle removal from surfaces by pulsed laser irradiation
- 31 March 1993
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 20 (1-2) , 159-170
- https://doi.org/10.1016/0167-9317(93)90213-o
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Particle removal from surfaces by pulsed-laser irradiationPublished by SPIE-Intl Soc Optical Eng ,1992
- Efficient pulsed laser removal of 0.2 μm sized particles from a solid surfaceApplied Physics Letters, 1991
- Removal of small particles from surfaces by pulsed laser irradiation: observations and a mechanismPublished by SPIE-Intl Soc Optical Eng ,1991
- Laser-assisted micron scale particle removalApplied Physics Letters, 1991