Electron Spin Resonance and Photoluminescence in a-Si1-xCx:H Deposited at Low Substrate Temperature

Abstract
Electron spin resonance and photoluminescence were measured for a-Si1-x C x :H films deposited at low substrate termperatures by a glow discharge method. In the range of the carbon content above 0.55, where the films show intense photoluminescence, the spin density in the film deposited at room temperature was less than 5×10-2 of that in the film deposited at 260°C. The lower spin density comes from the incorporation of a large number of H atoms in the film deposited at room temperature, which results in the intense photoluminescence.